Putra Wibisono
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Engineering Project

LPCVD Silicon Wafer Reactor Uniformity Modeling

Coupled fluid dynamics, heat/mass transfer simulation, and 2^k factorial Design of Experiments in COMSOL & MATLAB.

FIG. 3.1 — LPCVD SILICON WAFER BOAT REACTOR & 2^k FACTORIAL UNIFORMITY MODEL COMSOL MULTIPHYSICS // BOAT REACTOR Coupled Fluid Dynamics, Heat Transfer & Mass Transfer 2^k DESIGN OF EXPERIMENTS ~100% Wafer Uniformity · 2D & 3D MATLAB Uniformity Models · Key Process Parameter Identification

Context & Engineering Scope

Computational modeling and experimental design of a Low Pressure Chemical Vapor Deposition (LPCVD) boat reactor achieving nearly 100% silicon wafer deposition uniformity.

Achieving uniform silicon deposition across wafers inside an LPCVD boat reactor requires balancing coupled fluid dynamics, heat transfer, and mass transfer parameters.

Methodology & System Design

  1. 01. COMSOL Multiphysics Reactor Design: Built a boat reactor model in COMSOL combining fluid dynamics, heat transfer, and mass transfer physics.
  2. 02. 2^k Factorial Design of Experiments (DoE): Computed a 2^k factorial design to identify the most influential operating parameters.
  3. 03. 2D & 3D Wafer Uniformity Rendering: Rendered 2D and 3D wafer uniformity profiles in MATLAB to evaluate parameter sensitivity across the reactor.

Key Results

  • Designed a boat reactor configuration achieving nearly 100% silicon wafer uniformity in COMSOL simulations.
  • Quantified key process sensitivity parameters through 2^k Design of Experiments and 2D/3D MATLAB visualization.